发明名称 Method of making semiconductor device having a short gate length
摘要 A semiconductor device having a channel region having a first and a second portion. The first and second portions of the channel region are designed so that only a small portion is substantially depleted during operation. Thus, a semiconductor device having a short gate length is fabricated.
申请公布号 US5449628(A) 申请公布日期 1995.09.12
申请号 US19940179642 申请日期 1994.01.07
申请人 MOTOROLA, INC. 发明人 CAMBOU, BERTRAND F.;DAVIES, ROBERT B.
分类号 H01L21/285;H01L21/338;H01L29/10;H01L29/812;(IPC1-7):H01L21/825 主分类号 H01L21/285
代理机构 代理人
主权项
地址