发明名称 |
PRODUCTION OF CERAMIC MULTILAYER WIRING BOARD |
摘要 |
PURPOSE:To provide a method for producing a ceramic multilayer wiring board mounting a semiconductor device in which a via can be made within a predetermined pad forming region even if a ceramic laminate shrinks at a rate different from a standard rate in different direction. CONSTITUTION:An imaginary pad 30-S is set on the uppermost layer green sheet 21-1 while taking account of a standard shrinkage rate and vias 25-1, 25-2 are made at two point on a selected diagonal of he imaginary pad 30-S on the opposite sides of the center. The uppermost layer green sheet 21-1 is then laminated along with a plurality of other green sheets, pressed and fired to form a pad 30 to be bonded to a semiconductor device 10 on the surface of the uppermost layer ceramic sheet 21.
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申请公布号 |
JPH07240481(A) |
申请公布日期 |
1995.09.12 |
申请号 |
JP19940030714 |
申请日期 |
1994.03.01 |
申请人 |
FUJITSU LTD |
发明人 |
MISHIRO EIJI;TSUBONE KENICHIRO;ABE MITSUNORI |
分类号 |
H01L21/60;H01L21/56;H01L21/68;H01L21/768;H01L23/12;(IPC1-7):H01L23/12 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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