PATTERN INSPECTION DEVICE

摘要

PURPOSE:To provide a pattern inspection device capable of accurately executing efficient inspection even when the stripe width of plan data and the reading width of a sensor are different. CONSTITUTION:In the data base comparison type pattern inspection device, a bit pattern generation circuit 12 is equipped with a region extraction circuit 14 inputting plan data in a form of stripe like data having predetermined width and dividing the stripe-like data into inspection data having the stripe width corresponding to an inspection state and generates the bit pattern data corresponding to the inspection state on the basis of the output from the region extraction circuit 14.