摘要 |
An apparatus for X-ray analysis of materials in which the radiation excited by the specimen (2) is taken off at a grazing angle, notably an angle smaller than the critical angle for X-rays, with respect to the specimen surface. A signal-to-noise ratio is thus obtained which is comparable to that of the known TXRF method. Because the primary beam need not be paralleled before reaching the specimen (2), subsequent to the specimen adequate intensity remains to enable wavelength-dispersive detection. This enables measurement of X-rays excited by elements having an atomic number lower than 11. |