Dielektrisches Interferenz-Filtersystem, LCD-Anzeige und CCD-Anordnung sowie Verfahren zur Herstellung eines dielektrischen Interferenz-Filtersystems und Verwendung des Verfahrens
摘要
A dielectric interference filter comprises two filter elements 3 of different spectral characteristics on the same carrier substrate 1. The filter elements 3 have the same height and preferably adjoin each other without gaps. The system is used for, inter alia, interference colour filter systems in the form of LCD-displays or CCD-arrangements. A process for manufacturing the system includes forming at least one filter element (BG) by coating and subsequent etching, and forming at least one subsequent filter element (R) by coating and a subsequent lift-off operation in which the etching mask is used as the lift-off mask. <IMAGE>
申请公布号
DE4407067(A1)
申请公布日期
1995.09.07
申请号
DE19944407067
申请日期
1994.03.03
申请人
BALZERS AG, BALZERS, LI
发明人
SPERGER, REINHARD, DIPL.-ING. DR., FELDKIRCH, AT;RUDIGIER, HELMUT, DIPL.-PHYS. (ETH) DR., BAD RAGAZ, CH;WIERER, PETER, DR., BLUDENZ, AT;SCHOECH, HELMUT, FELDKIRCH, AT