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发明名称
摘要
申请公布号
JPH0783001(B2)
申请公布日期
1995.09.06
申请号
JP19840101977
申请日期
1984.05.21
申请人
发明人
分类号
H01L21/205;H01L21/22;H01L21/31;(IPC1-7):H01L21/22
主分类号
H01L21/205
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代理人
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