| 摘要 |
PURPOSE:To realize a bonding tool excellent in durability which has high strength, high hardness, and high toughness. CONSTITUTION:The bonding tool is composed of alumina-silicon carbide nanocomposite sintered material which is obtained as follows. Silicon carbide in the state of nanocomposite is contained in crystal grains of alumina. Silicon carbide of 1-20vol% is added to alumina. After molding, sintering is performed in Ar, H2 at a normal pressure or in a vacuum. Further HIP sintering is performed. |
