发明名称 |
System for measuring tilt of image plane of optical system using diffracted light |
摘要 |
A system used for measuring the tilt of an image formed by a lens. The measuring system has a light source, a diffraction grating, a reflection surface and a detector for detecting an interference pattern that is formed by the light after passing through the diffraction grating reflection surface and the lens.
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申请公布号 |
US5448355(A) |
申请公布日期 |
1995.09.05 |
申请号 |
US19940220682 |
申请日期 |
1994.03.31 |
申请人 |
ASAHI KOGAKU KOGYO KABUSHIKI KAISHA |
发明人 |
NOGUCHI, MASATO;IIZUKA, TAKASHI |
分类号 |
G01M11/02;(IPC1-7):G01B9/02 |
主分类号 |
G01M11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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