发明名称 Thin film high TC oxide superconductors and vapor deposition methods for making the same
摘要 Superconducting transition metal oxide films are provided which exhibit very high onsets of superconductivity and superconductivity at temperatures in excess of 40 DEG K. These films are produced by vapor deposition processes using pure metal sources for the metals in the superconducting compositions, where the metals include multi-valent nonmagnetic transition metals, rare earth elements and/or rare earth-like elements and alkaline earth elements. The substrate is exposed to oxygen during vapor deposition, and, after formation of the film, there is at least one annealing step in an oxygen ambient and slow cooling over several hours to room temperature. The substrates chosen are not critical as long as they are not adversely reactive with the superconducting oxide film. Transition metals include Cu, Ni, Ti and V, while the rare earth-like elements include Y, Sc and La. The alkaline earth elements include Ca, Ba and Sr.
申请公布号 US5447906(A) 申请公布日期 1995.09.05
申请号 US19940264227 申请日期 1994.06.23
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHAUDHARI, PRAVEEN;GAMBINO, RICHARD J.;KOCH, ROGER H.;LACEY, JAMES A.;LAIBOWITZ, ROBERT B.;VIGGIANO, JOSEPH M.
分类号 C30B1/02;C01G1/00;C01G3/00;C30B29/22;H01B12/06;H01B13/00;H01L39/12;H01L39/24;(IPC1-7):B32B9/00;B05D5/12 主分类号 C30B1/02
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