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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要
申请公布号
JPH07235509(A)
申请公布日期
1995.09.05
申请号
JP19940024317
申请日期
1994.02.22
申请人
MITSUBISHI ELECTRIC CORP
发明人
YOSHIYAMA KENJI
分类号
H01L21/28;H01L21/302;H01L21/3065;H01L29/78;(IPC1-7):H01L21/28;H01L21/306
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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