Angular velocity sensor having a tuning fork construction and its method of manufacture

摘要

The present invention relates to an angular velocity sensor utilized as a gyroscope and particularly, to a high-performance angular velocity sensor having a tuning-fork construction. The vibrator is formed of a metal base plate which is bent about 90 degrees along a center line defined by two opposite slits extending from their respective side edges to a central region of the metal base plate so that its two bent parts are orthogonal to each other. Two piezoelectric elements are bonded to the corresponding surfaces of the two parts of each vibrator which in turn serve as an actuator and a detector.