| 摘要 |
<p>PURPOSE:To provide a method of the manufacture of devices which makes it possible to manufacture highly accurate devices by step and scan exposure. CONSTITUTION:An original plate stage 2 supports an original plate 1, and a substrate stage 4 supports a substrate 3 during the step and scan exposure. The original plate stage 2 and the substrate stage 4 are separately shifted by respective driving sources 16, 17 in synchronization with each other. After the completion of each scan exposure, the substrate is shifted step by step relative to the original plate by means of the substrate stage. Thus a plurality of regions on the substrate are exposed one by one.</p> |
