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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07235591(A)
申请公布日期
1995.09.05
申请号
JP19940049949
申请日期
1994.02.24
申请人
NEC CORP
发明人
KURIYAMA ATSUSHI
分类号
H01L29/40;H01L21/316;H01L21/76;H01L27/12;(IPC1-7):H01L21/76
主分类号
H01L29/40
代理机构
代理人
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地址
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