| 摘要 |
PURPOSE:To reduce wear of the contact surface between a disc master and the mirror finished surface of a mold, suppress the amount of deformation of the disc master and prolong its lifetime by a method wherein wear relieving layer, which is made of metallic or ceramic film having the specified hardness, is provided on the rear surface of the disc master. CONSTITUTION:On the rear surface of a disc master made of Ni or the like, wear relieving layer 15 made of metallic film or ceramic film having the hardness of Hv 250 or higher is provided. In this case, the metallic film or ceramic film preferably has the coefficient of dynamic friction, which is measured by the pin-on-disc abrasion test with SUJ 2 pin, of 0.01-0.6. A wear-relieving layer, the metallic film of which is metal plated film, in which at least one selected from the group of lubricous particle consisting of silicon, molybdenum, PTFE and the like is dispersed, is provided. Further, the ceramic film is preferably made of PVD or CVD. |
