发明名称 Low-gas temperature stabilization system
摘要 The temperature of articles in an "environmental" chamber is stabilized by evacuation of the "environmental" chamber, after having stabilized the temperature of such an article to approximate that of a controlled-temperature member spaced from the article by a small gap, to a pressure just sufficient to provide viscous gas behavior, adjusting the temperature of the article to closely match that of the member by gas conduction heat transfer across the gap, and evacuating the chamber to high vacuum.
申请公布号 US5447431(A) 申请公布日期 1995.09.05
申请号 US19930145343 申请日期 1993.10.29
申请人 BROOKS AUTOMATION, INC. 发明人 MUKA, RICHARD S.
分类号 F27B17/00;F27D7/06;F27D19/00;(IPC1-7):F27D7/00;F27B5/04;F27D9/00 主分类号 F27B17/00
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