发明名称 |
X-ray exposure apparatus |
摘要 |
An X-ray apparatus is disclosed which includes a mirror having a reflection surface, for expanding an X-ray beam in a predetermined direction, a detecting device for detecting a relative positional relationship between the X-ray beam and the reflection surface with respect to a direction perpendicular to the reflection surface, and an adjusting device for adjusting the relative position of the X-ray beam and the reflection surface on the basis of the detection. Also disclosed is an exposure apparatus and a semiconductor device manufacturing method using the X-ray apparatus.
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申请公布号 |
US5448612(A) |
申请公布日期 |
1995.09.05 |
申请号 |
US19940275661 |
申请日期 |
1994.07.15 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KASUMI, KAZUYUKI;ABE, NAOTO;EBINUMA, RYUICHI;HASEGAWA, TAKAYUKI |
分类号 |
G03F7/20;(IPC1-7):G21K1/06 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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