Detector for detecting photons or particles, method for fabricating the detector, and measuring method

摘要

PCT No. PCT/FI95/00080 Sec. 371 Date Nov. 19, 1996 Sec. 102(e) Date Nov. 19, 1996 PCT Filed Feb. 17, 1995 PCT Pub. No. WO95/22834 PCT Pub. Date Aug. 24, 1995The object of the invention is a photon or particle detector which comprises a transmission dynode situated in a vacuum. The detector comprises a monolithically fabricated semiconductor structure in which electrons are arranged so as to travel from the semiconductor into a vacuum. At least a part of the multiplication region is formed into a layered structure incorporating at least one doped semiconductor transmission dynode and at least one vacuum space.