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发明名称
TWO-HOT-ZONE LOW PRESSURE CHEMICAL DEPOSITION APPARATUS
摘要
申请公布号
KR950007250(Y1)
申请公布日期
1995.09.04
申请号
KR19920016610U
申请日期
1992.09.01
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, KIL - KWANG;AN, YONG - CHOL;JONG, U - IN
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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