METHOD FOR THE DEPOSITION OF NICKEL AND/OR NICKEL OXIDE FROM THE GAS PHASE, AND NOVEL NICKEL COMPOUNDS HAVING STABLE VAPORISATION CHARACTERISTICS

摘要

A method is described for the deposition of nickel oxide and/or nickel from the gas phase, wherein an Ni( beta -diketonate)2.Lm is used as the nickel compound to be vaporised, where L is an organic (poly)ether and/or (poly)amine and m is 1 or 2 and indicates the number of ligands L bonded to one nickel ion. Novel nickel compounds of the type Ni(R<1>R<2>R<3>C-CO-CR<4>-CO-R<5>R<6>R<7>)2.-R<8>-A<1>-(CH2CH2-A<2>)n-R<9>, where R<1> and R<7> independently of one another represent H, CH3 or CpF2p+1, where p is a number from 0 to 3, and R<2>, R<3>, R<4>, R<5> and R<6> independently of one another represent H, CH3, F or CF3; A<1> and A<2> independently of one another represent O or NR<10>; R<8>, R<9> and R<10> each represent a hydrogen atom or a C1-C3 alkyl group, and in particular a methyl group, whereby R<8> and R<9> may also be joined to from a C2-C3 alkylene group, and n is a number from 1 to 3; with the proviso that when A<1> and A<2> represent NR<10>, n is 2, are also described.