Industriematerial mit fluorpassivierter Schicht und Verfahren zum Herstellen desselben.,申请号DE1991611488-传众专利搜索

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发明名称	Industriematerial mit fluorpassivierter Schicht und Verfahren zum Herstellen desselben.
摘要
申请公布号	DE69111488(D1)	申请公布日期	1995.08.31
申请号	DE1991611488	申请日期	1991.03.11
申请人	MITSUBISHI ALUMINIUM CO., LTD., TOKIO/TOKYO, JP;HASHIMOTO CHEMICAL CORP., OSAKA, JP	发明人	OHMI, TADAHIRO, SENDAI-SHI, MIYAGI, JP;CHIBA, KAZUO, MISHIMA-SHI, SHIZUOKA, JP;MIKASA, YUTAKA, MISHIMA-SHI, SHIZUOKA, JP;ISHIGAMI, KENJI, SUSONO-SHI, SHIZUOKA, JP;MIKI, NOBUHIRO, OHSAKA-SHI, OHSAKA, JP;MAENO, MATAGORO, IZUMI-SHI, OHSAKA, JP;KIKUYAMA, HIROHISA, NARA-SHI, NARA, JP
分类号	C23C8/02;C23C8/08;C23C18/36;C23C28/00;C23F15/00;H01L21/205;H01L21/31;H01L21/68;H01S3/03;H01S3/225;(IPC1-7):H01L21/68;C23C30/00	主分类号	C23C8/02
代理机构		代理人
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