Carbon target material for forming carbon thin film and process for production thereof.

摘要

A carbon target material for forming a carbon thin film, consisting essentially of a vitreous carbon produced from a polycarbodiimide resin; and a process for producing a carbon target material for forming a carbon thin film, which comprises molding into an appropriate shape a polycarbodiimide or a composition mainly comprising a polycarbodiimide and then carbonizing the resulting shaped material. Said carbon target material for forming a carbon thin film is free from the problems of the prior art; causes no abnormal discharge and generates no powder leading to contamination, during sputtering; and has a high purity.