发明名称 High temperature and high pressure cleaning equipment.
摘要 The invention relates to a high temperature/high pressure cleaning equipment. The invention is characterized in that a cleaning equipment having at least a compressing pump, a heating device, a nozzle, and a piping, which injects high temperature/high pressure water from the nozzle to a matter to be cleaned has a function to inject high temperature/high pressure ultra pure water from the nozzle. <IMAGE>
申请公布号 EP0669641(A1) 申请公布日期 1995.08.30
申请号 EP19950106307 申请日期 1991.01.07
申请人 OHMI, TADAHIRO 发明人 OHMI, TADAHIRO;KAWAKAMI, MICHIYA;YAGI, YASUYUKU;OHWADA, TOHRU;TAKAHARA, YASUSHI
分类号 H01L21/304;B08B3/02;H01L21/00;H01L21/306 主分类号 H01L21/304
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