发明名称 |
High temperature and high pressure cleaning equipment. |
摘要 |
The invention relates to a high temperature/high pressure cleaning equipment. The invention is characterized in that a cleaning equipment having at least a compressing pump, a heating device, a nozzle, and a piping, which injects high temperature/high pressure water from the nozzle to a matter to be cleaned has a function to inject high temperature/high pressure ultra pure water from the nozzle. <IMAGE> |
申请公布号 |
EP0669641(A1) |
申请公布日期 |
1995.08.30 |
申请号 |
EP19950106307 |
申请日期 |
1991.01.07 |
申请人 |
OHMI, TADAHIRO |
发明人 |
OHMI, TADAHIRO;KAWAKAMI, MICHIYA;YAGI, YASUYUKU;OHWADA, TOHRU;TAKAHARA, YASUSHI |
分类号 |
H01L21/304;B08B3/02;H01L21/00;H01L21/306 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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