Method of working aluminum nitride ceramics.

摘要

A method of working aluminum nitride ceramics is adapted to enable accurate cutting and smoothing of a surface of an aluminum nitride ceramics workpiece and to improve the working speed without exerting a bad influence on the material of the aluminum nitride ceramics workpiece itself. A surface of an aluminum nitride ceramics workpiece (5) is irradiated with light (2) having a wavelength which is in the range of 190 nm and not more than 360 nm, and worked. Proper working can be performed by defining the energy density of the light as applied, the divergence angle of a beam and the half-width of the spectrum in prescribed ranges. A laser beam (2) is converged by cylindrical lenses (3, 4) or cylindrical mirrors. It is possible to widen the range of application of aluminum nitride ceramics to the field of structural members, which have generally been hard to work with requirement for high costs.