发明名称 |
Manufacture of quartz glass crucible for use in the manufacture of single crystal in silicon. |
摘要 |
<p>A quartz glass crucible for use in a process for pulling a single crystal silicon and having an outer layer (3) and an inner layer (4). The outer layer (3) contains less than 0.3 ppm each of Na, K and Li and more than 5 ppm of Al. The outer layer (3) further contains bubbles to present an opaque appearance. The inner layer (4) is made by melting powders of high purity non-crystalline synthetic silica and contains less then 200 ppm of OH group. There is also disclosed a method for producing the crucible. <IMAGE></p> |
申请公布号 |
EP0463543(B1) |
申请公布日期 |
1995.08.30 |
申请号 |
EP19910109973 |
申请日期 |
1991.06.18 |
申请人 |
SHIN-ETSU QUARTZ PRODUCTS CO., LTD. |
发明人 |
MATSUMURA, MITSUO;MATSUI, HIROSHI |
分类号 |
C03C3/06;C03B19/09;C03B20/00;C03C17/04;C30B15/10;C30B35/00;(IPC1-7):C30B15/10 |
主分类号 |
C03C3/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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