摘要 |
An improved rotatable magnetron enabling efficient removal and replacement of a target structure, having axially movable structures including at least one spindle, which may be extended to engage or retracted to disengage the target structure, and means for extending into a magnet structure within the target structure to selectively fix a rotational position of the magnet structure, and preferably having water and vacuum seals integrated into cartridges which are disposed between spindles and seal housings of the improved rotatable magnetron.
|