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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH07228970(A)
申请公布日期
1995.08.29
申请号
JP19940019346
申请日期
1994.02.16
申请人
NEC CORP;NIPPON DENKI FACTORY ENG KK
发明人
TAHIRA TSUTOMU;HIRAMATSU SHINICHI
分类号
C23C14/34;H01L21/203;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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