| 摘要 |
A pressure-measuring arrangement has a pressure-sensor structure with a diaphragm whose pressure-dependent deflection is measurable capacitively by means of a first electrode (=measuring electrode) disposed on the diaphragm and forming a measuring capacitance, Cs, together with a fixed counter-electrode. A second electrode forming a second pressure-dependent capacitance, Cf, together with the counter-electrode is implemented and disposed on the diaphragm. A third electrode forms a constant reference capacitance, Cr, together with the fixed counter-electrode. An evaluating circuit derives the pressure by a capacitance measurement and has the following transfer function: F=[Cs(p)-Cr]/Cf(p). The first electrode and the second electrode are separated by a boundary having an angularly extending profile optimized with respect to a minimal linearity error. This profile varies as a function of the variable radius of the first electrode and the variable radius of the second electrode.
|
