发明名称 Apparatus for testing and producing semiconductor chips and integrated circuits
摘要 A probe board is provided with a guide-mask system. The probe board has at least one head which passes through a respective guide-hole located on the filmed guide-mask. The utilization of this guide-mask has the advantage of minimizing slipping of probe heads out of respective mating test terminals of IC chips. Additionally, the utilization of this guide-mask provides accurate probe head positioning and provides enforcement to the heads by way of the filmed guide-mask because of the precise support holes provided in the masks.
申请公布号 US5446624(A) 申请公布日期 1995.08.29
申请号 US19930081144 申请日期 1993.06.25
申请人 TOHO ELECTRONICS, INC. 发明人 SAITO, KIMIYOSHI
分类号 G01R1/073;(IPC1-7):H05K1/02 主分类号 G01R1/073
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