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发明名称
摘要
申请公布号
NL6509695(A)
申请公布日期
1966.02.25
申请号
NL19650009695
申请日期
1965.07.27
申请人
发明人
分类号
C23C14/22;H01L21/00;H01L21/10
主分类号
C23C14/22
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