发明名称 Method of fabricating a high-voltage, vertical-trench semiconductor device
摘要 An optically-triggered silicon controlled rectifier (SCR) (21) having a number of semiconductor layers (23, 24, 31) diffused into an N type substrate (22). Specifically, the SCR is formed by diffusing a first P+ layer (23) into an upper surface of the substrate. Then, an N+ layer (24) is diffused into a portion of an upper surface of the first P+ layer. An oxide layer (25) which is permeable to optical radiation is formed on the first P+ layer. A conductive cathode terminal (26) is then deposited on the N+ layer. Therefore, a trench (30) is etched in the lower surface of the substrate. The trench is defined by a depth and a surface. A second P+ layer (31) is diffused into the surface of the trench. The depth of the trench substantially defines a spacing between the first and second P+ layers. The chip is soldered onto a pedestal (33) formed on a lead frame (34). The solder is deposited in the trench and contacts the second P+ layer to form an anode terminal (36). The pedestal may be formed by either etching or stamping a depression (35) in the lead frame.
申请公布号 US5445974(A) 申请公布日期 1995.08.29
申请号 US19930120147 申请日期 1993.09.10
申请人 SIEMENS COMPONENTS, INC. 发明人 WHITNEY, DAVID
分类号 H01L29/74;H01L29/739;H01L29/78;H01L29/86;H01L29/87;H01L31/111;(IPC1-7):H01L49/00;H01L21/461 主分类号 H01L29/74
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