RADIATION SENSITIVE RESIN COMPOSITION

摘要

PURPOSE:To provide a radiation sensitive resin composition particularly excellent in resolution and pattern shape, having excellent sensitivity and developing property with excellent contrast and heat resistance and useful as a chemical amplification type resist. CONSTITUTION:The radiation sensitive resin composition contains a copolymer (A) expressed by a formula and a radiation sensitive acid initiator (B) or contains the copolymer (A), the acid initiator (B) and an alkali soluble resin (C). (where, each of (m) and (n) is an integers of number representing each recurring unit and satisfies the relation of 0.1<=(m)/(m+n)<0.6 and 0.4<(n)/(m+n)<=0.9.