发明名称 BOARD HOLDER
摘要 <p>PURPOSE:To provide a board holder whereby each board of a plurality of boards having different sizes from each other can be held always in the state wherein the warp and waviness of each board are straightened. CONSTITUTION:In the central part of the board mount surface of a board holder, first recessed parts 8a-8d are provided, and in the peripheral part of the board mount surface, second recessed parts 8e, 8f communicated respectively to the first recessed parts are provided. Also, the first recessed parts 8a-8d are communicated to a pressure reducing means for reducing the pressure of the first recessed parts. Further, when the board put on the board mount surface is suction-stuck thereon and is held thereon by the reduction of the pressure of the first recessed parts, the two paths whereby the second recessed parts 8e, 8f are communicated respectively to the first recessed parts are switched respectively by a switching member 2 according to the size of the board put on the board mount surface.</p>
申请公布号 JPH07231033(A) 申请公布日期 1995.08.29
申请号 JP19940019055 申请日期 1994.02.16
申请人 NIKON CORP 发明人 ISHIMARU KATSUAKI
分类号 B23Q3/08;H01L21/027;H01L21/68;H01L21/683;(IPC1-7):H01L21/68 主分类号 B23Q3/08
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