| 摘要 |
PCT No. PCT/DE92/00447 Sec. 371 Date Dec. 6, 1993 Sec. 102(e) Date Dec. 6, 1993 PCT Filed Jun. 2, 1992 PCT Pub. No. WO92/21957 PCT Pub. Date Dec. 10, 1992.Process for emission spectroscopy, particularly for laser emission spectroscopy, wherein the radiation emitted by the laser-induced plasma of the workpiece to be analyzed is decomposed by a spectrometer and at least one fraction of the found spectrum is transferred to a processing unit. In order to improve the process from the point of view of measurement precision and speed, it is carried out in such a manner that an influencing of the intensity of the plasma-inducing laser beam takes place depending on at least one emission-influencing parameter for the production of definite plasma states, this parameter being measured during plasma formation, and that the transfer of the found spectrum or of a fraction thereof to the processing unit is performed, as long as the measured plasma parameter is within a predetermined tolerance range (TI./.TII).
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