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发明名称
MODULAR STRUCTURE
摘要
申请公布号
JPH07231055(A)
申请公布日期
1995.08.29
申请号
JP19940020858
申请日期
1994.02.18
申请人
HITACHI LTD
发明人
SAITO HIRONORI;MORIGUCHI AKISADA;HATA MASAHARU;TAJIRI KAZUYUKI;YUMOTO OSAMU
分类号
H01L23/36;(IPC1-7):H01L23/36
主分类号
H01L23/36
代理机构
代理人
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