| 摘要 |
PURPOSE:To cool a blower at a constant temperature without causing dew condensation on an external mirror or the like by providing cooling water piping to cool external optical parts, behind piping for cooling the blower assembled in a gas laser beam machine. CONSTITUTION:The cooling water piping 230a for flowing water to cool external optical parts is connected to external optical parts and cooling water piping 22a which is branched in the cooling water piping 22c after cooling a blower 8. After the exhaust of the inside of a discharge tube 2, piping (outgoing) 10a and piping (returning) 10b for circulating laser gas, etc., by a vacuum pump, laser gas is supplied and circulated by the blower 8. Simultaneously, cooling water is supplied from a cooling water circulating device 20, cooling the blower 8 inside a gas laser generator 1, first heat exchanger 9a, second heat exchanger 9b, etc., and also cooling an external mirror 30 and a condenser lens 33. After the cooling, a high voltage is applied between discharging electrodes 5 and 6 by a DC hightension power source 7, generating a glow discharge. |
