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发明名称
FILM FORMING DEVICE
摘要
申请公布号
JPH07228965(A)
申请公布日期
1995.08.29
申请号
JP19940046446
申请日期
1994.02.20
申请人
SEMICONDUCTOR ENERGY LAB CO LTD
发明人
HAYASHI SHIGENORI;ITO KENJI;YAMAZAKI SHUNPEI
分类号
C23C14/32;C23C16/44;G11B5/84;(IPC1-7):C23C14/32
主分类号
C23C14/32
代理机构
代理人
主权项
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