Method and appts. for vacuum coating in a large coating chamber

摘要

Vacuum coating of substrates in a large coating chamber employs a constant, linear process gas stream - which covers the entire axial length of the coating chamber - between a gas inlet (11) and a diametrically opposite connection to a vacuum pump system, with condensible gases and vapours condensed on surfaces of a deep-cooling system (15). The same gas stream or a separate flushing gas stream is maintained after the end of the coating process, the deep-cooling system is stopped or heated under at least partial vacuum until disappearance of the condensation. Only then the gas flow is stopped and the chamber is ventilated. The connection to the vacuum pump system is attached to a pre-vacuum chamber (4) which adjoins the coating chamber for substrates (10) and is provided with an array (7) of baffle/restrictor plates.