Elektronenstrahl-Belichtungsverfahren und Gerät hierfür.,申请号DE19906021025-传众专利搜索

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发明名称	Elektronenstrahl-Belichtungsverfahren und Gerät hierfür.
摘要
申请公布号	DE69021025(D1)	申请公布日期	1995.08.24
申请号	DE19906021025	申请日期	1990.12.12
申请人	KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP;TOSHIBA MICRO-ELECTRONICS CORP., KAWASAKI, JP	发明人	SUZUKI, TOSHIYUKI, YOKOHAMA-SHI, KANAGAWA-KEN, JP
分类号	H01L21/30;H01J37/304;H01J37/317;H01L21/027;(IPC1-7):H01J37/317	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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