DETECTOR FOR DETECTING PHOTONS OR PARTICLES, METHOD FOR FABRICATING THE DETECTOR, AND MEASURING METHOD

摘要

The object of the invention is a photon or particle detector (10) which comprises a transmission dynode (30) situated in a vacuum. The detector comprises a monolithically fabricated semiconductor structure in which electrons are arranged so as to travel from the semiconductor into a vacuum. At least a part of the multiplication region (44) is formed into a layered structure incorporating at least one doped semiconductor transmission dynode and at least one vacuum space (35).