| 摘要 |
PURPOSE:To use only one light source for exposure such as a short-arc lamp and to reduce the cost of a device and operation by switching light from the light for exposure by the 2nd optical means selectively to the 1st and the 2nd optical paths. CONSTITUTION:When a substrate 41 at the 1st exposure part 45 is exposed, the plane mirror 55 of the 2nd optical means is set to an angle shown by a two-dot chain line and a shutter 63 is opened to guide the light from the light source 53 for exposure to the 1st exposure part 45. At this time, a shutter 64 is closed not to make excessive light leak to the 2nd exposure part 46. When a substrate 42 at the end exposure part 46 is exposed, on the other hand, the plane mirror 55 is changed to an angle shown by a solid line. Then the shutter 64 is closed to guide the light from the exposure light source 53 to the substrate 42. At this time, the shutter 64 is closed. Thus, the plane mirror 55 (2nd optical means) is used to switch the light from the one exposure light source 53 selectively. |
