发明名称
摘要 Positive photoresist compositions are provided which contain (a) a photosensitizer comprising a mixture of mono-, di-, and triesters of 2,3,4-trihydroxybenzophenone and 1,2-naphthoquinone-2-diazo-4-sulfonic acid and (b) a novolak resin selected from resins prepared from a phenolic component having a high p-cresol content or from a mixture of formaldehyde and an aromatic aldehyde.
申请公布号 JPH0778627(B2) 申请公布日期 1995.08.23
申请号 JP19890078688 申请日期 1989.03.31
申请人 发明人
分类号 G03F7/022;G03F7/023;H01L21/027;(IPC1-7):G03F7/022 主分类号 G03F7/022
代理机构 代理人
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