Semi-transparent diamond film.

摘要

A method is provided for making semi-transparent polycrystalline diamond film having a thickness greater than 50 microns which can be used as a heat sink in microelectronic applications. A mixture of hydrogen and a carbon-chlorine containing material such as carbon tetrachloride is conveyed into a heated filament reaction zone adjacent to an appropriate substrate, such as molybdenum to produce non-adherent semi-transparent diamond film.