Use of metallic halide as a carrier gas in the vapor deposition of iii-v compounds,申请号US19650457754-传众专利搜索

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发明名称	Use of metallic halide as a carrier gas in the vapor deposition of iii-v compounds
摘要
申请公布号	US3249473(A)	申请公布日期	1966.05.03
申请号	US19650457754	申请日期	1965.05.21
申请人	GENERAL ELECTRIC COMPANY	发明人	JR. NICK HOLONYAK,
分类号	H01L21/205;H01L29/00	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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