| 发明名称 |
Electrostatic chuck with erosion-resistant electrode connection. |
| 摘要 |
An electrostatic chuck (32) is provided for firmly holding a semiconductor substrate (8) in position in a processing chamber (10). The electric connection (46) for the electrode (34) of the electrostatic chuck is provided through an aperture (44) in the pedestal (30) to protect the strap portion (40) of the chuck from erosion caused by the processing environment. <IMAGE> <IMAGE> |
| 申请公布号 |
EP0668608(A1) |
申请公布日期 |
1995.08.23 |
| 申请号 |
EP19950300811 |
申请日期 |
1995.02.09 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SHAMOUILIAN, SHAMOUIL;BIRANG, MANOOCHER;GOLDSPIEL, ALAN;NORTHUP, RON;SOMEKH, SASSON |
| 分类号 |
B23Q3/15;C23C16/44;C23C16/455;C23C16/458;H01L21/203;H01L21/205;H01L21/302;H01L21/3065;H01L21/683;H02N13/00 |
主分类号 |
B23Q3/15 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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