| 摘要 |
PURPOSE:To provide a discharge pumping excimer laser equipment wherein the consumption of electrode material of a discharge electrode is little, the laser output is scarcely decreased by gas state discharge product and particulate discharge product, and the life is long. CONSTITUTION:One out of 13 kinds of metals such as titanium and I vanadium, or alloy of them is used as the electrode material for one or both of the discharge electrodes 2a, 2b. Particulate a and gas state discharge product which are generated in a laser tube 1 is compulsorily sent out toward the outside of the tube 1 together with laser medium and buffer gas. The particulate discharge product is electrostatically or mechanically captured and eliminated. The gas state discharge product is cooled at a specified temperature with a gas cleaning means 16, and is made to react with chemically active material. After the product is isolated and eliminated by turning it into a solid state or a semisolid state, the gas is circulated by sending it in the vicinity of an optical window 3 in the laser tube 1. |
