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发明名称
METHOD AND APPARATUS FOR DRY-ETCHING
摘要
申请公布号
JPH07226393(A)
申请公布日期
1995.08.22
申请号
JP19940018004
申请日期
1994.02.15
申请人
SONY CORP
发明人
YANAGIDA TOSHIHARU
分类号
C23F4/00;H01L21/302;H01L21/3065;H01L21/3205;H01L21/3213;(IPC1-7):H01L21/306;H01L21/320;H01L21/321
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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