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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07226385(A)
申请公布日期
1995.08.22
申请号
JP19940015613
申请日期
1994.02.10
申请人
FUJITSU LTD
发明人
ANAYAMA CHIKASHI
分类号
H01L21/22;(IPC1-7):H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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