| 摘要 |
<p>PURPOSE:To provide an element of a stable resistance value regarding an inner layer resistance which is formed by arranging a resistor inside a substrate for ensuring a wide mounting area of a surface of a ceramic multilayer board whereon a high-speed LSI is mounted. CONSTITUTION:Screen print is performed for RuO2, IrO2, RhO2 paste as a resistance element 1 and Ag or AgPd paste as a conductor wiring 3 in a multilayer board. In the process, an AgPd or AgPt barrier layer 2 is formed between the wiring conductor 3 and the resistance element 1. In the process, weight ratio of Ag incorporated in the barrier layer 2 is set lower than Ag incorporated in the conductor wiring 3. Diffusion of Ag constituting a wiring conductor into a resistor is restrained by the barrier layer 2 and a resistance value of a resistance element is much stabler than a conventional one.</p> |
