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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07226520(A)
申请公布日期
1995.08.22
申请号
JP19940016144
申请日期
1994.02.10
申请人
NIPPONDENSO CO LTD
发明人
FUKADA TAKESHI
分类号
H01L29/84;H01L21/3063;(IPC1-7):H01L29/84;H01L21/306
主分类号
H01L29/84
代理机构
代理人
主权项
地址
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