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发明名称
SUBSTRATE HEATING MECHANISM OF THIN FILM FORMING DEVICE
摘要
申请公布号
JPH07224382(A)
申请公布日期
1995.08.22
申请号
JP19940035230
申请日期
1994.02.09
申请人
ANELVA CORP
发明人
HIRATA KAZUO
分类号
C23C14/24;C23C14/50;C23C16/44;C23C16/46;(IPC1-7):C23C14/50
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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FEED SUPPLEMENTS
